Highly Stabilized MEMS Switch with Low Actuation Voltage

This paper presents an innovative design of a low loss RF MEMS switch, with low actuation voltage (VT) & improved mechanical stability. The switch is less sensitive to the stiction and has less damping effect which ultimately increases the reliability of the switch. The specialty of this switch is that its beam is made up of two materials, one gives mechanical stability and other provides the conducting path to the ground. The proposed switch is fabricated on a coplanar waveguide (CPW) & actuated by electrostatic force. The mechanical and electrical performance of the switch has been tested. The simulation results show that the actuation voltage can be reduced by using serpentine folded spring, and improved mechanical stability and reduced stiction can be achieved by using a hydrophobic material with high Young’s modulus as insulator in between top and bottom electrode where damping effect can be reduced by making holes on the beam. The measured pull-in voltage for the switch is 3V.